Effects of Polarity Inversion Layer on Performances of Lateral-Field-Excitation Piezoelectric Sensors Based on Lithium Niobate Single Crystal

In this work, lateral-field-excitation (LFE) piezoelectric sensors based on polarity inversion layer are designed and fabricated, then frequency stabilities sensitivities electric property changes of liquids tested. Because the can suppress spurious modes, LFE devices with a obviously better than that no layer. On liquid conductivity permittivity, 2.4 times 2.1 higher layer, respectively. The lithium niobate crystal plate be realized conveniently by heat treatment, therefore, technology play an important role in improving sensing performances sensors.